[labnetwork] question about Liner for Ni Ebeam Evaporation

[Mark K Mondol]

I have also found that evaporating Ni without a liner works well.  I would also suggest that you try not to "dig a hole" by using the soak cycle to allow any holes to be filled.  E-beam evaporators guns are designed with a specific focus, changing the height of the source means that your beam may be defocused, producing a bigger apparent source size and also requiring more power for the same evaporation rate.

Mark K Mondol
Domain Expert - e-Beam Lithography
Bldg 24 Room 041
 mondol at mit.edu
cell - 617-224-8756
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Shawn Wagoner <swagone at gmu.edu>
Sent: Wednesday, December 4, 2024 9:01 AM
To: shokoofe haghighi <shokoofe_haghighi at yahoo.com>; labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] question about Liner for Ni Ebeam Evaporation


For e-beam of Ni you should try a “starter source”.  At least that is the term I learned long ago.  It is a solid piece of Ni in the shape of the pocket of your gun.  No additional liner is used.  As you evaporate the Ni and create a small hole in the top of the source you simply add Ni pellets.  It last a long time this way.  Most of the suppliers should be able to supply this to you.  I used to buy them from Kamis.



Shawn



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of shokoofe haghighi
Sent: Wednesday, December 4, 2024 4:35 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] question about Liner for Ni Ebeam Evaporation



External Message: Use Caution



Hi, hope you are having good days,



this is Haghighi, working on metallization by a PVD, using thermal and Ebeam evaporation.



I have some issues choosing the right liner for Ni Ebeam evaporating, hope you find time to guide me through it.

We have tested graphite, glassy carbon coated graphite, Al2O3, Mo, W and Cu liners so far.

    Graphite liner just broke after first run from the border line of Ni surface. Glassy carbon coated graphite was more or less the same,

    Al2O3 endured for 4-5 runs before breaking but there were cracks on it,

    Mo liner totally melted and some kind of alloy was produced,

    W and Cu endured but their internal walls were some how melted and we can't be sure about pureness of evaporated Ni and final produced thin films.



do you have any other suggestions?





high voltage: 6.1 KV

emission current: 3 - 5 A





Thanks for your time and attention in advance, I hope you kindly find time and consider replying me,



Dr. Haghighi


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