[labnetwork] question about Liner for Ni Ebeam Evaporation

[Bernhard Reineke]

Hi Haghighi,

we tried this once, same result. All liners will crack. Lesker has some recommendations on Ebeam evaporation of Ni: slow power ramp up and down (works well to prevent cracking for ~2-4 Runs, with fabmate). A Cu liner should work better but we never tested that.

https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=ni1

Best,

Bernhard
________________________________
Von: labnetwork <labnetwork-bounces at mtl.mit.edu> im Auftrag von shokoofe haghighi <shokoofe_haghighi at yahoo.com>
Gesendet: Mittwoch, 4. Dezember 2024 10:35:19
An: labnetwork at mtl.mit.edu
Betreff: [labnetwork] question about Liner for Ni Ebeam Evaporation

Hi, hope you are having good days,

this is Haghighi, working on metallization by a PVD, using thermal and Ebeam evaporation.

I have some issues choosing the right liner for Ni Ebeam evaporating, hope you find time to guide me through it.
We have tested graphite, glassy carbon coated graphite, Al2O3, Mo, W and Cu liners so far.
    Graphite liner just broke after first run from the border line of Ni surface. Glassy carbon coated graphite was more or less the same,
    Al2O3 endured for 4-5 runs before breaking but there were cracks on it,
    Mo liner totally melted and some kind of alloy was produced,
    W and Cu endured but their internal walls were some how melted and we can't be sure about pureness of evaporated Ni and final produced thin films.

do you have any other suggestions?


high voltage: 6.1 KV
emission current: 3 - 5 A


Thanks for your time and attention in advance, I hope you kindly find time and consider replying me,

Dr. Haghighi

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