[labnetwork] Management and handling of Dichloro Silane

[Leif Steen Johansen]

Hello Chiara,

At DTU Nanolab we have the following DCS setup:


1.       Distance Between Gas Cabinet and Instrument:

a.       Ca. 50 meters from gas bunker to tool. Unpractical, but a safety requirement.

2.       Gas Line Configuration:

a.       The gas is run in double walled tubes. The outer tube’s pressure is monitored.

b.       All pipes are orbital welded ASTM 316L steel, electro polished to a roughness < 0.25µm (10 µInches). This is a specialist job you can’t trust your local plumber to perform.

c.       Bottle and lines are heated and insulated. Our gas pipes run through low temperature environments, ca. 0-5 deg C (32 to 41 deg F) in the winter. This is a challenge. Loss of heating causes gas condensation, which can be tricky to get rid of.

3.       Issues related to the DCS gas line:

a.       Proper leak testing of the gas line is vital. Make sure that there are no leaks, as they can ruin the gas line and harm people.

b.       Perform 80-120 of pump/purges with a dry inert gas (nitrogen) before introducing the DCS in order to prevent reaction with trace moist and oxygen.

4.       Safety Measures:

a.       Gas monitoring at the bottle cabinet and at points of use (LPCVD furnaces).

b.       All non-welded fittings should be in ventilated enclosures with gas monitoring.

c.       In case of detected gas or pressure change in the outer pipe wall, the gas alarm system automatically shuts down bottle and lines and evacuates the affected area by an audible alarm.

Hope this was helpful.

Best regards,
Leif

Leif Steen Johansen
Head of Operations, Ph.D.

Dir. +45 45 25 57 13
Mob. +45 25 34 89 92
lesjo at dtu.dk<mailto:lesjo at dtu.dk>
Ørsteds Plads, Byg. 347
Building 347
2800 Lyngby
www.dtu.dk/english<https://www.dtu.dk/english>




From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Chiara Gionco
Sent: 26. november 2024 14:39
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Management and handling of Dichloro Silane


Dear labnetwork,

I'm Chiara Gionco, and I am a researcher at INRiM, the Italian Institute of Metrology and I'm part of the Managing Committee of our new Cleanroom facility, shared with Politecnico di Torino and Università degli Studi di Torino.

We are in the process of acquiring gas facilities to support an LPCVD system (Tystar MiniTytan 1600) in our cleanroom, and I would greatly appreciate any feedback regarding the management and handling of Dichloro Silane.

To ensure the best practices for our installation, I would like to inquire about how DCS is handled at your institute. Specifically, I am interested in the following:
1.      Distance Between Gas Cabinet and Instrument: How far is the gas cabinet located from the LPCVD system?
2.      Gas Line Configuration: Is the gas line and the bottle heated, and if so, what specifications are followed for heating it?
3.      Issues related to the DCS gas line: Are there any common issues related to the DCS gas line after installation? What are your solutions?
4.      Safety Measures: Are there any additional precautions or setups you would recommend to ensure safe and efficient operation?

Thank you very much for your time and assistance.

Best regards,
Chiara Gionco, Ph.D.
Researcher
011-3919 214
Italian National Metrology Institute (INRiM)
Strada delle Cacce 91, 10135, Torino (Italy)
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