[labnetwork] Academic fab chemical starter recs

[Dwayne Chrusch]

Hello Russ,

Below is list of all of the common supplies for our Cleanroom. 

For HF/BOE we do a first rinse with CaCl2 dissolved in water (5 rinses total). Try 400-450g per 4L (1 Gal. = 3.78L). Reduce until you no longer get precipitate (depends on the temperature in the lab). 

Note: Some of the VWR and Fisher Sci. part numbers may be discontinued, but the web pages should recommend alternatives.  


Regards,

Dwayne D. Chrusch, BSc. (EE), MSc.
Operations Manager, Training & Safety Coordinator
Nanosystem Fabrication Lab (NSFL)
E3-471 Engineering
75A Chancellor's Circle
University of Manitoba
Winnipeg, Manitoba
Canada, R3T 5V6

==========
Part # (VWR/Fisher)
==========
> 351 Dev  CA11025-170
> Acetone  CAJT9005-5 (old) / BDH2025-1GLP
> CaCl2  CAAA12316-A7 / 31505385
> Ethanol  CA71007-222 /
> A9954 (Fischer Sci)
> H2O2  CAHX0635-2
> H2SO4  CA11024-170
> HF Gel  CA06645
> HPR 504  CA11019-872
> IPA CAJT9079-5
> Methanol / BP11054
> Cleanroom  Gloves 89130-852 / 17-986-004
> Cotton  80081-602 MCR Safety
> NDex (Chase area)  CA32891-809 / 29-635-200
> Neoprene  80081-504
> Vinyl  12000-146
> 
> Kimwipes  CA21905-011 / 06-666-1A
> Durx wipes  21913-412 / 1798779A
> 
> Glasses  CA14227-708 & CA33002-210
> Lab coats  82128-748
> Hair nets 10135-742
> Masks  414004-667
> Shoe covers  21923-234
> 
> Bottles, Glass 16218-186
> Beakers  10754-956
> Flowmeter  54848-092
> uScope slides 470145-790
> Petri, Pyrex 76175-266
> Petri, Styr  75838-866
> Wash Bottle   03-409-20D
> Silicone tube 89068-474
> Syringe 10mL 97048-652
> Swabs  89022-998 / 18-378
> Amber glass bottles ???/02912151
> Cleanroom notebooks TWTX5708/TX5708
==========


> On Dec 10, 2024, at 2:36 PM, Russ Renzas <rrenzas at unr.edu> wrote:
> 
> Caution! This message was sent from outside the University of Manitoba.
> 
> Setting up the fab at University of Nevada, Reno – looking for recs on a relatively generic “starter kit” of chemicals and photoresists, etc. Also, any recommendations on US-based vendors to buy from.
>  
> I do have some older stuff that’s mostly unused from an aborted attempt at getting this fab running two years ago with one part-time grad student, but a lot of it is expired. Much of it was bought in quantities that make no sense (e.g. one giant bottle of one specific type of PR and a 4x4L of KOH). 
>  
> Right now we have:
> 	• Acetone, IPA of course.
> 	• HMDS: expired 2023. Still unused, but thinking this should be replaced.
> 	• Sulfuric acid and H2O2, expired 2022. Thinking I should keep the expired sulfuric acid for “general use”, get rid of the expired H2O2, and replace with Nano-Strip.
> 	• Nitric acid.
> 	• Aluminum etchant Type A.
> 	• BOE 7:1, expired 12/22. I’d imagine this is fine?
> 	• HF, no expiration
> 	• KOH: expired Aug. 23, probably fine.
>  
> Photoresists & related:
> 	• AZ 1505, expired 2022. Probably fine? Are there other positive resists I should be starting out with instead?
> 	• AZ NLOF 2020, expired 2023. Probably fine?
> 	• AZ 300 MIF Developer, expired 2023. Is it preferable to replace with a non-TMAH developer such as AZ 351B for safety?
> 	• AZ KWIK Strip Remover: expired 2023. Seems fine? Is NMP just as well?
> 	• SU-8 100 & developer: expired, but I think I can ignore this until somebody actually needs it.
>  
> I have a few interested users and my own research to support once we’re “operational” in 3-4 months, but for the immediate right-now I’m focused on creating a handful of relatively generic SOPs that I can use to get us off the ground, qualify tools, etc. Love how many SOPs are on the academic fab websites out there! Now to go figure out how to get my maskless aligner off the pallet.
>  
> Thanks!
>  
> Russ
>  
> Russ Renzas, Ph.D.
> Director, Davidson Foundation Cleanroom
> College of Engineering
> University of Nevada, Reno
>  
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