[labnetwork] Academic fab chemical starter recs

[Garry J. Bordonaro]

Also, https://kayakuam.com/ and https://imicromaterials.com/ are good
sources.

 

 

Garry J. Bordonaro

Microlithographic Engineer

Cornell NanoScale Facility

250 Duffield Hall

343 Campus Road

Ithaca NY 14853-2700

(607) 254-4936

 <mailto:bordonaro at cnf.cornell.edu> bordonaro at cnf.cornell.edu

 <http://www.cnf.cornell.edu/> http://www.cnf.cornell.edu/

 

Please acknowledge CNF in your publications:

"This work was performed in part at the Cornell NanoScale Science &
Technology Facility (CNF), a member of the National Nanotechnology
Coordinated Infrastructure (NNCI), which is supported by the National
Science Foundation (Grant NNCI-2025233)."

 

 

 

 

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Russ Renzas
Sent: Tuesday, December 10, 2024 3:36 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Academic fab chemical starter recs

 

Setting up the fab at University of Nevada, Reno - looking for recs on a
relatively generic "starter kit" of chemicals and photoresists, etc. Also,
any recommendations on US-based vendors to buy from. 

 

I do have some older stuff that's mostly unused from an aborted attempt at
getting this fab running two years ago with one part-time grad student, but
a lot of it is expired. Much of it was bought in quantities that make no
sense (e.g. one giant bottle of one specific type of PR and a 4x4L of KOH). 

 

Right now we have:

*	Acetone, IPA of course. 
*	HMDS: expired 2023. Still unused, but thinking this should be
replaced.
*	Sulfuric acid and H2O2, expired 2022. Thinking I should keep the
expired sulfuric acid for "general use", get rid of the expired H2O2, and
replace with Nano-Strip.
*	Nitric acid.
*	Aluminum etchant Type A.
*	BOE 7:1, expired 12/22. I'd imagine this is fine?
*	HF, no expiration
*	KOH: expired Aug. 23, probably fine. 

 

Photoresists & related:

*	AZ 1505, expired 2022. Probably fine? Are there other positive
resists I should be starting out with instead?
*	AZ NLOF 2020, expired 2023. Probably fine?
*	AZ 300 MIF Developer, expired 2023. Is it preferable to replace with
a non-TMAH developer such as AZ 351B for safety?
*	AZ KWIK Strip Remover: expired 2023. Seems fine? Is NMP just as
well?
*	SU-8 100 & developer: expired, but I think I can ignore this until
somebody actually needs it.

 

I have a few interested users and my own research to support once we're
"operational" in 3-4 months, but for the immediate right-now I'm focused on
creating a handful of relatively generic SOPs that I can use to get us off
the ground, qualify tools, etc. Love how many SOPs are on the academic fab
websites out there! Now to go figure out how to get my maskless aligner off
the pallet. 

 

Thanks!

 

Russ

 

Russ Renzas, Ph.D.

Director, Davidson Foundation Cleanroom

College of Engineering

University of Nevada, Reno

 

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