[labnetwork] question about Liner for Ni Ebeam Evaporation

[Graham Gibson]

   It's interesting to see such a wide variety of experiences. I'm too chicken to evaporate right out of the pocket, so we went through a lot of liners, too, before settling on something.

   We have had good luck with Cu liners for Ni e-beam evaporation, but with a 2.2 cc pocket, we have to be very careful to keep the beam away from the walls and limit the deposition rate to 1 Angstrom/s.

  Hope you find something that works, liners get expensive!


Graham Gibson

Operations Manager, NanoFabrication Kingston
Queen's University
945 Princess Street
Kingston, Ontario, Canada
K7L 0E9
gibsong at queensu.ca<mailto:gibsong at queensu.ca>
www.nanofabkingston.ca<http://www.nanofabkingston.ca/>



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Owain Clark
Sent: December 5, 2024 3:48 AM
To: Jeff Salzmann <jks7 at buffalo.edu>; Bernhard Reineke <bernhard.reineke at uni-paderborn.de>; shokoofe haghighi <shokoofe_haghighi at yahoo.com>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] question about Liner for Ni Ebeam Evaporation

Interestingly we have no trouble with Ni, it is one of our most stable materials and the crucible has not been changed in years. I believe it is W.

I suspect reading these comments it is because we have larger 40cc crucibles and we only melt a spot in the center with a small beam deflection. The crucible walls never see melted Ni.

BR, Owain

From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Jeff Salzmann
Sent: 04 December 2024 17:15
To: Bernhard Reineke <bernhard.reineke at uni-paderborn.de<mailto:bernhard.reineke at uni-paderborn.de>>; shokoofe haghighi <shokoofe_haghighi at yahoo.com<mailto:shokoofe_haghighi at yahoo.com>>; labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] question about Liner for Ni Ebeam Evaporation

You don't often get email from jks7 at buffalo.edu<mailto:jks7 at buffalo.edu>. Learn why this is important<https://aka.ms/LearnAboutSenderIdentification>
CAUTION: This e-mail originated outside the University of Southampton.
Haghighi,

This is my collection of failed crucibles used to evaporate Ni.

We decided on graphite, because copper was worse. We limit our deposition rate to 0.2 Å/sec to help extend the lifespan of the crucibles. They still fail after 2-3 depositions.

Regards,
Jeff


Jeff Salzmann
Assistant Professor of Research
Cleanroom Manager, Shared Instrumentation Laboratories
School of Engineering and Applied Sciences
University at Buffalo
114A Davis Hall
Buffalo, NY 14260
Tel: 716.645.2584

From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> on behalf of Bernhard Reineke <bernhard.reineke at uni-paderborn.de<mailto:bernhard.reineke at uni-paderborn.de>>
Date: Wednesday, December 4, 2024 at 11:46
To: shokoofe haghighi <shokoofe_haghighi at yahoo.com<mailto:shokoofe_haghighi at yahoo.com>>, labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu> <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: Re: [labnetwork] question about Liner for Ni Ebeam Evaporation
You don't often get email from bernhard.reineke at uni-paderborn.de<mailto:bernhard.reineke at uni-paderborn.de>. Learn why this is important<https://aka.ms/LearnAboutSenderIdentification>
Hi Haghighi,

we tried this once, same result. All liners will crack. Lesker has some recommendations on Ebeam evaporation of Ni: slow power ramp up and down (works well to prevent cracking for ~2-4 Runs, with fabmate). A Cu liner should work better but we never tested that.

https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=ni1

Best,

Bernhard
________________________________
Von: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> im Auftrag von shokoofe haghighi <shokoofe_haghighi at yahoo.com<mailto:shokoofe_haghighi at yahoo.com>>
Gesendet: Mittwoch, 4. Dezember 2024 10:35:19
An: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Betreff: [labnetwork] question about Liner for Ni Ebeam Evaporation

Hi, hope you are having good days,

this is Haghighi, working on metallization by a PVD, using thermal and Ebeam evaporation.

I have some issues choosing the right liner for Ni Ebeam evaporating, hope you find time to guide me through it.
We have tested graphite, glassy carbon coated graphite, Al2O3, Mo, W and Cu liners so far.
    Graphite liner just broke after first run from the border line of Ni surface. Glassy carbon coated graphite was more or less the same,
    Al2O3 endured for 4-5 runs before breaking but there were cracks on it,
    Mo liner totally melted and some kind of alloy was produced,
    W and Cu endured but their internal walls were some how melted and we can't be sure about pureness of evaporated Ni and final produced thin films.

do you have any other suggestions?


high voltage: 6.1 KV
emission current: 3 - 5 A


Thanks for your time and attention in advance, I hope you kindly find time and consider replying me,

Dr. Haghighi

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