[labnetwork] question about Liner for Ni Ebeam Evaporation

[Beaudoin, Mario]

We use a Cu crucible (4.4cc in a 7cc pocket) with good results.

Mario


On 2024-12-11 9:11 a.m., Graham Gibson wrote:
> [*CAUTION:* Non-UBC Email]
>
>    It’s interesting to see such a wide variety of experiences. I’m too 
> chicken to evaporate right out of the pocket, so we went through a lot 
> of liners, too, before settling on something.
>
>    We have had good luck with Cu liners for Ni e-beam evaporation, but 
> with a 2.2 cc pocket, we have to be very careful to keep the beam away 
> from the walls and limit the deposition rate to 1 Angstrom/s.
>
>   Hope you find something that works, liners get expensive!
>
> Graham Gibson
>
> Operations Manager, NanoFabrication Kingston
>
> Queen’s University
>
> 945 Princess Street
>
> Kingston, Ontario, Canada
>
> K7L 0E9
>
> gibsong at queensu.ca <mailto:gibsong at queensu.ca>
>
> www.nanofabkingston.ca <http://www.nanofabkingston.ca/>
>
> *From:*labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of 
> *Owain Clark
> *Sent:* December 5, 2024 3:48 AM
> *To:* Jeff Salzmann <jks7 at buffalo.edu>; Bernhard Reineke 
> <bernhard.reineke at uni-paderborn.de>; shokoofe haghighi 
> <shokoofe_haghighi at yahoo.com>; labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] question about Liner for Ni Ebeam Evaporation
>
> Interestingly we have no trouble with Ni, it is one of our most stable 
> materials and the crucible has not been changed in years. I believe it 
> is W.
>
> I suspect reading these comments it is because we have larger 40cc 
> crucibles and we only melt a spot in the center with a small beam 
> deflection. The crucible walls never see melted Ni.
>
> BR, Owain
>
> *From:*labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of *Jeff 
> Salzmann
> *Sent:* 04 December 2024 17:15
> *To:* Bernhard Reineke <bernhard.reineke at uni-paderborn.de>; shokoofe 
> haghighi <shokoofe_haghighi at yahoo.com>; labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] question about Liner for Ni Ebeam Evaporation
>
>
> 	
>
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>
> *CAUTION:*This e-mail originated outside the University of Southampton.
>
> Haghighi,
>
> This is my collection of failed crucibles used to evaporate Ni.
>
> We decided on graphite, because copper was worse. We limit our 
> deposition rate to 0.2Å/sec to help extend the lifespan of the 
> crucibles. They still fail after 2-3 depositions.
>
> Regards,
>
> Jeff
>
> Jeff Salzmann
>
> Assistant Professor of Research
>
> Cleanroom Manager, Shared Instrumentation Laboratories
>
> School of Engineering and Applied Sciences
>
> University at Buffalo
>
> 114A Davis Hall
>
> Buffalo, NY 14260
>
> Tel: 716.645.2584
>
> *From: *labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of 
> Bernhard Reineke <bernhard.reineke at uni-paderborn.de>
> *Date: *Wednesday, December 4, 2024 at 11:46
> *To: *shokoofe haghighi <shokoofe_haghighi at yahoo.com>, 
> labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
> *Subject: *Re: [labnetwork] question about Liner for Ni Ebeam Evaporation
>
>
> 	
>
> You don't often get email from bernhard.reineke at uni-paderborn.de. 
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>
> Hi Haghighi,
>
> we tried this once, same result. All liners will crack. Lesker has 
> some recommendations on Ebeam evaporation of Ni: slow power ramp up 
> and down (works well to prevent cracking for ~2-4 Runs, with fabmate). 
> A Cu liner should work better but we never tested that.
>
> https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=ni1
>
> Best,
>
> Bernhard
>
> ------------------------------------------------------------------------
>
> *Von:*labnetwork <labnetwork-bounces at mtl.mit.edu> im Auftrag von 
> shokoofe haghighi <shokoofe_haghighi at yahoo.com>
> *Gesendet:* Mittwoch, 4. Dezember 2024 10:35:19
> *An:* labnetwork at mtl.mit.edu
> *Betreff:* [labnetwork] question about Liner for Ni Ebeam Evaporation
>
> Hi, hope you are having good days,
>
> this is Haghighi, working on metallization by a PVD, using thermal and 
> Ebeam evaporation.
>
> I have some issues choosing the right liner for Ni Ebeam evaporating, 
> hope you find time to guide me through it.
>
> We have tested graphite, glassy carbon coated graphite, Al2O3, Mo, W 
> and Cu liners so far.
>
>     Graphite liner just broke after first run from the border line of 
> Ni surface. Glassy carbon coated graphite was more or less the same,
>
>     Al2O3 endured for 4-5 runs before breaking but there were cracks 
> on it,
>
>     Mo liner totally melted and some kind of alloy was produced,
>
>     W and Cu endured but their internal walls were some how melted and 
> we can't be sure about pureness of evaporated Ni and final produced 
> thin films.
>
> do you have any other suggestions?
>
> high voltage: 6.1 KV
>
> emission current: 3 - 5 A
>
> Thanks for your time and attention in advance, I hope you kindly find 
> time and consider replying me,
>
> Dr. Haghighi
>
>
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