[labnetwork] STS mechanical clamp "fingers"

[Nathan Aultman]

Good morning David,
We didn’t know that KLA supported parts for this old etcher.  We have limited documentation on the tool, and the CD ROM that we have is no longer readable.  It runs on Windows NT.
Thank you for the suggestion!
Nathan

From: LaFleur, David W <dlafleur at cns.fas.harvard.edu>
Sent: Friday, December 13, 2024 8:01 AM
To: Nathan Aultman <naultman at creol.ucf.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] STS mechanical clamp "fingers"

Hi Nathan,

Did you reach out to KLA? They own the STS name and that’s who I get my parts from. My fingers are a little different from yours but the same basic design. KLA still sells them to us.

Regards,

David LaFleur
Equipment Engineer
CNS, Harvard University
11 Oxford St.
Cambridge, Ma. 02138




From: "labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>" <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> on behalf of Nathan Aultman <naultman at creol.ucf.edu<mailto:naultman at creol.ucf.edu>>
Date: Thursday, December 12, 2024 at 7:54 PM KLA still sells them
To: "labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] STS mechanical clamp "fingers"

Hello labnetwork,

Are they any STS labs out there that can suggest where to obtain replacement wafer clamp “fingers?”  Are there any labs that have made their own replacements?
Thank you in advance.

Nathan C. Aultman
University of Central Florida
407-823-6852
naultman at creol.ucf.edu<mailto:naultman at creol.ucf.edu>

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