[labnetwork] STS mechanical clamp "fingers"

[Paolini, Steven]

You can re-attach the fingertips with epoxy if you clean the surfaces and abrade them slightly to get a mechanical bond. The O2 cleaning plasma degrades the adhesive over time.

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Nathan Aultman
Sent: Thursday, December 12, 2024 1:37 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] STS mechanical clamp "fingers"

Hello labnetwork,

Are they any STS labs out there that can suggest where to obtain replacement wafer clamp "fingers?"  Are there any labs that have made their own replacements?
Thank you in advance.

Nathan C. Aultman
University of Central Florida
407-823-6852
naultman at creol.ucf.edu<mailto:naultman at creol.ucf.edu>

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