[labnetwork] Local cooling of large rough pumps

[Samantha Roberts]

Hello Labnetwork --

I hope you have had been having a good holiday!

I have a situation where our main facility chiller is offline and for reason beyond our control may be offline for some time.  We do not have a facility-scale backup chiller 🙁.

Has anyone implemented local cooling solutions for their plasma tool rough pumps?
One idea might be to have several individual smaller air cooled SMC-HRS-050 type chillers<https://www.smcelectric.com/products/smc-spnhrs050an20/?srsltid=AfmBOooeEziJMZnHJXZuusTW5CAROr0mVf6TMwfapY0K72tJPtqaUb_o> (or the like) each cooling a single Pfeiffer pump (Such as is used for ICPs and PECVD pumps).

However, I am not certain of what the critical values are to be satisfied, and how to determine if this is even feasible.  I am currently looking at the water temperature and flow requirements for the pump at the moment, but do not know if these are the only considerations.

If anyone has implemented individual cooling solution for pumps the size of Pfeiffer pumps A604<https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7> <https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7> or A124<https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je> <https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je> I would love to hear what specific chillers you have used and what your experience of this has been.

Thanks – and happy new year!

Best
Sam

____________________________________
Samantha Roberts PhD
ASRC Nanofabrication Facility Director
City University of New York

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