[labnetwork] HMDS Detection

Steven Spalsbury spals at uw.edu
Mon Jul 29 14:00:17 EDT 2024


Hello Lab Network,

Is anyone aware of a sensor that can detect HMDS vapor leaks?


Thank you,

Steven Spalsbury
Equipment Engineer
Washington Nanofabrication Facility (WNF)
University of Washington
spals at uw.edu<mailto:spals at uw.edu>
https://www.wnf.washington.edu/
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