[labnetwork] HMDS Detection

[Mark Dye]

Contact Art Beverleigh from MDC

http://mdcsystemsinc.com/

Best Regards,

Mark M. Dye
Director of Marketing and Business Development
SilPac
408-768-1362

On Jul 29, 2024, at 3:06 PM, Steven Spalsbury <spals at uw.edu> wrote:


Hello Lab Network,

Is anyone aware of a sensor that can detect HMDS vapor leaks?


Thank you,

Steven Spalsbury
Equipment Engineer
Washington Nanofabrication Facility (WNF)
University of Washington
spals at uw.edu<mailto:spals at uw.edu>
https://www.wnf.washington.edu/<https://urldefense.proofpoint.com/v2/url?u=https-3A__www.wnf.washington.edu_&d=DwMFAg&c=euGZstcaTDllvimEN8b7jXrwqOf-v5A_CdpgnVfiiMM&r=91kK0c-DN6w-PsAvqN051JsgaTljpCwfnNeQXBBm-IE&m=nMpw1E6GGUo_xTFSfkpezSkcT-uwfjmn8Hi8Bxqb32OFYuO80a7rGKwodyFtNktS&s=16bgl2LqZsl_Dx6z_eodhGi6ULYl7oGR-e9AZ1ZBIEg&e=>
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