[labnetwork] Photomask sticks to SU8

[Jorg Scholvin]

I would first try rinse the mask with SU8 developer to remove (develop) unexposed SU8 residues.

Sticking is probably because prebake conditions were insufficient (thicker films have longer bake times than thin films, and it's easy for students to miss that when they scale up from thin to thick films)

Best,

-Jorg


From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Chang, Long
Sent: Friday, June 7, 2024 5:50 PM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Photomask sticks to SU8

Hello,

I just used Quartz Cr photomask for the first time with SU8 3050 and the SU8 stuck to the photomask after exposure, see photo. How can I prevent SU8 from sticking to my mask? How should I clean the mask?

Thanks,
Long Chang
UH Nanofabrication Facility
Houston, TX
lvchang at central.uh.edu<mailto:lvchang at central.uh.edu>
[cid:image001.png at 01DAB917.2B201480]


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