[labnetwork] Photomask sticks to SU8

[Chang, Long]

Hello,

I just used Quartz Cr photomask for the first time with SU8 3050 and the SU8 stuck to the photomask after exposure, see photo. How can I prevent SU8 from sticking to my mask? How should I clean the mask?

Thanks,
Long Chang
UH Nanofabrication Facility
Houston, TX
lvchang at central.uh.edu<mailto:lvchang at central.uh.edu>
[cid:F0FA288B-200E-402B-846E-5EA05666DAFE]



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