[labnetwork] [External] Re: Temporary Cleanroom Spaces

[Vlahakis, James]

Hi Matt, thanks for the info, much appreciated.

Our lab (link<https://engineering.tufts.edu/microfab/tufts-micro-and-nano-fabrication-facility>) is leased, repurposed space about ¼ mile off campus, among a number of university labs located here. The administration is interested moving the lab(s) to on campus location(s) which would reduce some costs. Obviously there would be other expenses, but those seem to come out of a different, less critical cost center.

We would like to reproduce the capabilities – lithography, PVD, CVD, chemical processing, characterization, etc. - in our current space and require at least as much room ~1200sq ft. I would push hard for more space though. Where this might be located on campus is unknown right now

A new cleanroom is many years away – so the administration would like to know more about temporary space and thus I am putting together information for them

jim


From: Matthew Moneck <mmoneck at andrew.cmu.edu>
Sent: Wednesday, June 12, 2024 1:15 PM
To: Vlahakis, James <James.Vlahakis at tufts.edu>
Cc: Labnetwork <labnetwork at mtl.mit.edu>
Subject: [External] Re: [labnetwork] Temporary Cleanroom Spaces

Hi Jim,

I have had experience in building and using modular cleanrooms in the past for single tool installs, clean assembly projects, 2D exfoliation, and more .  We have used options ranging from a small 6'x6' softwall unit with curtains, a single FFU, and casters for mobility all the way up to a 19'x20' hardwall option designed to perform close to Class 100 specs.  In one case we converted an entire room into a Class 10,000 space.  Options vary significantly depending on the size needed, the applications of interest (i.e. what type of tooling you plan to install or work to be done), and how "modular" it needs to be.

What size and type of application do you have in mind?

We have worked with Clean Air Products in the past and were happy with the outcome.

Best Regards,

Matt

On Wed, Jun 12, 2024 at 12:11 PM Vlahakis, James <James.Vlahakis at tufts.edu<mailto:James.Vlahakis at tufts.edu>> wrote:
Hi Labnetwork friends, hope your summer is going well.

Our university administration is discussing a temporary or modular cleanroom space – not the first time this has come up but it seems a bit more serious this time around. I’ve asked similar questions in the past but it seems more serious now so I am drilling down again…..

Does anyone have experience with these cleanrooms, especially in a university setting? Contact info for a supplier would certainly be a help. Any info on this area would be greatly appreciated

Thanks!

jim

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Matthew T. Moneck, Ph.D
Executive Director, Claire & John Bertucci Nanotechnology Laboratory
Electrical & Computer Engineering | Carnegie Mellon University
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Phone: 412-268-5430
ece.cmu.edu<http://ece.cmu.edu>
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