[labnetwork] III-V and Silicon Wafer Lapping Tool and CMP tool

Fri Jun 21 15:19:38 EDT 2024

Hello, Everyone,

I am at UC Davis trying to setup some wafer lapping and CMP tools for heterogeneous integration (III-V or other materials on Silicon on Insulator wafers).

We have a nice set of EVG plasma activation and wafer bonding tools, but we don’t have wafer lapping or CMP tools at UC Davis.

We got a quotation for a new DISCO DAG810 wafer lapping tool and another quotation for a new AXUS CMP tool.

Unfortunately they are too expensive for us.

Does anyone have good solutions for lower cost methods or lower cost tools?

We are trying to wafer bond III-V wafers (GaAs or InP, 2 -3 inch diameter, ~500 micron thickness) on SOI wafers (150 mm typical), and then lap the III-V wafers down to ~100 micron before chemically selectively etching the rest of the III-V substrate material (GaAs or InP) stopping at the etch stop layer.

In some other structures, we also do CMP of similar wafers with devices on them.

Please  let me know if you know of less expensive solutions.

It would be nice if we can find a ~40% discounted solution (we can use refurbished units).

Thank you all.

-Ben

_______________________________________________________________________________

S. J. Ben Yoo
Joint Faculty LBL and UC Davis 
Distinguished Professor, Department of Electrical and Computer Engineering
Room 3110, Kemper Hall
Mail Code 1915
University of California
Davis, California 95616
Mobile: (510) 407-2457
Fax: (530) 752-8428
email: sbyoo at ucdavis.edu
home page: http://sierra.ece.ucdavis.edu
_______________________________________________________________________________ 

> On Jun 14, 2024, at 10:03 AM, Vlahakis, James <James.Vlahakis at tufts.edu> wrote:
> 
> Hi Matt, thanks for the info, much appreciated.
>  
> Our lab (link <https://engineering.tufts.edu/microfab/tufts-micro-and-nano-fabrication-facility>) is leased, repurposed space about ¼ mile off campus, among a number of university labs located here. The administration is interested moving the lab(s) to on campus location(s) which would reduce some costs. Obviously there would be other expenses, but those seem to come out of a different, less critical cost center.
>  
> We would like to reproduce the capabilities – lithography, PVD, CVD, chemical processing, characterization, etc. - in our current space and require at least as much room ~1200sq ft. I would push hard for more space though. Where this might be located on campus is unknown right now
>  
> A new cleanroom is many years away – so the administration would like to know more about temporary space and thus I am putting together information for them
>  
> jim
>  
>  
> From: Matthew Moneck <mmoneck at andrew.cmu.edu <mailto:mmoneck at andrew.cmu.edu>>
> Sent: Wednesday, June 12, 2024 1:15 PM
> To: Vlahakis, James <James.Vlahakis at tufts.edu <mailto:James.Vlahakis at tufts.edu>>
> Cc: Labnetwork <labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu>>
> Subject: [External] Re: [labnetwork] Temporary Cleanroom Spaces
>  
> Hi Jim,
>  
> I have had experience in building and using modular cleanrooms in the past for single tool installs, clean assembly projects, 2D exfoliation, and more .  We have used options ranging from a small 6'x6' softwall unit with curtains, a single FFU, and casters for mobility all the way up to a 19'x20' hardwall option designed to perform close to Class 100 specs.  In one case we converted an entire room into a Class 10,000 space.  Options vary significantly depending on the size needed, the applications of interest (i.e. what type of tooling you plan to install or work to be done), and how "modular" it needs to be.  
>  
> What size and type of application do you have in mind?
>  
> We have worked with Clean Air Products in the past and were happy with the outcome.  
>  
> Best Regards,
> 
> Matt
>  
> On Wed, Jun 12, 2024 at 12:11 PM Vlahakis, James <James.Vlahakis at tufts.edu <mailto:James.Vlahakis at tufts.edu>> wrote:
> Hi Labnetwork friends, hope your summer is going well.
>  
> Our university administration is discussing a temporary or modular cleanroom space – not the first time this has come up but it seems a bit more serious this time around. I’ve asked similar questions in the past but it seems more serious now so I am drilling down again…..
>  
> Does anyone have experience with these cleanrooms, especially in a university setting? Contact info for a supplier would certainly be a help. Any info on this area would be greatly appreciated
>  
> Thanks!
>  
> jim
>  
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>  
> --
> --
> Matthew T. Moneck, Ph.D
> Executive Director, Claire & John Bertucci Nanotechnology Laboratory
> Electrical & Computer Engineering | Carnegie Mellon University
> 5000 Forbes Avenue, Pittsburgh, PA 15213-3890
> Phone: 412-268-5430
> ece.cmu.edu <http://ece.cmu.edu/>
> nanofab.ece.cmu.edu <http://nanofab.ece.cmu.edu/> 
>  
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