[labnetwork] Thermal processing

[Dan P. Woodie]

Michael,

Any work with toxic materials should involve protection of researchers from those materials. Depending on the level of risk of the materials, quantities, and other similar considerations, not only should the furnace effluent be vented, but often the furnace should be located inside some form of enclosure that protects personnel from an accidental release of the material should a fitting come loose, the furnace tube breaks, or some other unplanned but foreseeable event occurs. Larger fab scale furnaces often have an enclosure around the tool containing the furnace tube as well as all of the associated piping and this is attached to ventilation, so it is at a negative pressure compared to the room. Often for bench size tube furnaces like this (https://www.thermofisher.com/us/en/home/life-science/lab-equipment/lab-ovens-furnaces/lab-furnaces.html#lab-tube), researchers will place them inside a fume hood to provide this exhaust, but fume hoods have a high airflow demand compared to a less open enclosure.

In any case, both the enclosure for accidental releases as well as exhaust for the expected furnace effluent should be reviewed against your local codes and regulations as well as the Tulane EH&S requirements.

Dan

Daniel Woodie
Director, Micro/Nano Fabrication Center, Princeton Materials Institute

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Johnson, Michael W
Sent: Tuesday, May 21, 2024 7:57 PM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Thermal processing

Lab network,

Is there a best practices for installing tube furnaces in a shared user facility? I'm asking about exhaust ventilation.
Mostly to be used for CVD with some toxic materials.
Are these always installed with exhaust, sometimes?

Appreciate any guidance.

-Michael.
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