[labnetwork] Cambridge nanotech Savannah S100 filter unit and oil pump trap

[Gohmyeong Bae]

Dear Lab Network,

We have one of Cambridge nanotech Savannah S100 ALD system inside of our nano fabrication center.

I am seeking for the EDWARDS APGX-H NW16 ST/ST filter unit and oil fore line trap(NW25) with conical shape.

Can I get any information about these or get some service engineer contact point for entire system overhaul?

Thank you.

Best regards,
Gohmyeong Bae.

Gohmyeong Bae, M. S.
He/Him/His
Institute of Applied Life Science (IALS)
Cleanroom Facility Manager for Nano and Device Fabrication Cleanroom
Conte building B111, Marcus Hall 25
Amherst, MA 01003
413-472-1570
gohmyeongbae at umass.edu

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20241108/3d59f4c0/attachment.html>