[labnetwork] Cambridge nanotech Savannah S100 filter unit and oil pump trap

[Kyle Keenan]

Hi Gohmyeong,

I have an idea of what you mean, but your terminology seems a bit
inaccurate. I think you might be referring to the porous filter in the
vacuum gauge tube and the conical mesh trap on the inlet of your vacuum
pump. Could you share pictures of the items you are talking about?

Thanks,
Kyle

On Fri, Nov 8, 2024 at 1:00 PM Gohmyeong Bae <gohmyeongbae at umass.edu> wrote:

> Dear Lab Network,
>
> We have one of Cambridge nanotech Savannah S100 ALD system inside of our
> nano fabrication center.
>
> I am seeking for the EDWARDS APGX-H NW16 ST/ST filter unit and oil fore
> line trap(NW25) with conical shape.
>
> Can I get any information about these or get some service engineer contact
> point for entire system overhaul?
>
> Thank you.
>
> Best regards,
> Gohmyeong Bae.
>
> *Gohmyeong Bae, M. S.*
> He/Him/His
> *Institute of Applied Life Science (IALS)*
> *Cleanroom Facility Manager for Nano and Device Fabrication Cleanroom*
> Conte building B111, Marcus Hall 25
> Amherst, MA 01003
> *413-472-1570*
> *gohmyeongbae at umass.edu <gohmyeongbae at umass.edu>*
>
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-- 
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925
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