[labnetwork] Sentech GmbH ICP-RIE etch and ICP-CVD tools

[Golan Tanami]

Dear Labnetwork,

I was wondering if any of you has an experience with these tools (SI500 and SI500 D).
More specifically, please relate to their long-term reliability and their remote-support service in case needed.

Best regards,

Golan.



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Golan A. Tanami, PhD | Head of the Unit for Nanofabrication (UNF)

Center for Nanoscience and Nanotechnology
Edmond J. Safra Campus
The Hebrew University of Jerusalem
T +972.2.6584179 | M +972.50.9891111
golant at savion.huji.ac.il<mailto:golant at savion.huji.ac.il>
Website: https://nano.huji.ac.il/UNF


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