[labnetwork] Management and handling of Dichloro Silane

[Robert Vandusen]

Hi Chiara.
At our facility we use DCS for our LPCVD silicon nitride process.
Our gas cabinet is ~ 15 feet away from the system. We use unheated ¼” OD (1/8 ID) SS gas lines to feed the Nitride tube nupro valve which is on the bottle side of the MFC.
We set the pressure at the bottle regulator to 5-7 psi (there is a note that DCS liquifies at 9.6psi).

Also since we do not use our LPCVD nitride process every day (maybe once or twice a week) we purge out the DCS MFC after every run and flow N2 through it while in standby mode.
This helps to prolong the MFC life.  The N2 is pumped out and the MFC is leakchecked before introducing the DCS for the next run.
Before this procedure we were going through several MFCs/ year.

Hope this helps.
   Robert Vandusen
   Microfabrication Cleanlab Facility Manager
   Electronics Department
   Carleton University
   room: 4184 Mackenzie Building
   613-520-2600 ext 5761
   Robert_vandusen at cunet.carleton.ca<mailto:Robert_vandusen at cunet.carleton.ca>



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Chiara Gionco
Sent: November 26, 2024 8:39 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Management and handling of Dichloro Silane

[External Email]

Dear labnetwork,

I'm Chiara Gionco, and I am a researcher at INRiM, the Italian Institute of Metrology and I'm part of the Managing Committee of our new Cleanroom facility, shared with Politecnico di Torino and Università degli Studi di Torino.

We are in the process of acquiring gas facilities to support an LPCVD system (Tystar MiniTytan 1600) in our cleanroom, and I would greatly appreciate any feedback regarding the management and handling of Dichloro Silane.

To ensure the best practices for our installation, I would like to inquire about how DCS is handled at your institute. Specifically, I am interested in the following:
1.       Distance Between Gas Cabinet and Instrument: How far is the gas cabinet located from the LPCVD system?
2.       Gas Line Configuration: Is the gas line and the bottle heated, and if so, what specifications are followed for heating it?
3.       Issues related to the DCS gas line: Are there any common issues related to the DCS gas line after installation? What are your solutions?
4.       Safety Measures: Are there any additional precautions or setups you would recommend to ensure safe and efficient operation?

Thank you very much for your time and assistance.

Best regards,
Chiara Gionco, Ph.D.
Researcher
011-3919 214
Italian National Metrology Institute (INRiM)
Strada delle Cacce 91, 10135, Torino (Italy)
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