[labnetwork] Management and handling of Dichloro Silane

[Chiara Gionco]

Dear labnetwork,

I'm Chiara Gionco, and I am a researcher at INRiM, the Italian Institute of
Metrology and I'm part of the Managing Committee of our new Cleanroom
facility, shared with Politecnico di Torino and Università degli Studi di
Torino.

We are in the process of acquiring gas facilities to support an LPCVD
system (Tystar MiniTytan 1600) in our cleanroom, and I would greatly
appreciate any feedback regarding the management and handling of Dichloro
Silane.

To ensure the best practices for our installation, I would like to inquire
about how DCS is handled at your institute. Specifically, I am interested
in the following:

   1. *Distance Between Gas Cabinet and Instrument:* How far is the gas
   cabinet located from the LPCVD system?
   2. *Gas Line Configuration:* Is the gas line and the bottle heated, and
   if so, what specifications are followed for heating it?
   3. *Issues related to the DCS gas line*: Are there any common issues
   related to the DCS gas line after installation? What are your solutions?
   4. *Safety Measures:* Are there any additional precautions or setups you
   would recommend to ensure safe and efficient operation?

Thank you very much for your time and assistance.

Best regards,
Chiara Gionco, Ph.D.
Researcher
011-3919 214
Italian National Metrology Institute (INRiM)
Strada delle Cacce 91, 10135, Torino (Italy)
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