[labnetwork] Small footprint PECVD for silicon nitride

[Joseph Losby]

Hi everyone,

We are looking for a smaller footprint PECVD tool strictly for the deposition of high quality SiN films.  Would you have any recommendations or other advice?  Some options are the Oxford PlasmaPro 80 and Trion Orion systems.

Cheers,
Joe



Joseph Losby, PhD

Manager, qLab Operations

joseph.losby at ucalgary.ca


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