[labnetwork] Small footprint PECVD for silicon nitride

[James Grant]

Hi Joseph,

What's your definition of high quality SiN?

In autumn 2023 we installed an OIPT PlasmaPro 100 PECVD<https://plasma.oxinst.com/products/pecvd/plasmapro-100-pecvd> (process chamber same as PlasmaPro 80 but with loadlock).

Been a tremendous success (course I'm a little biased(!)). Tool uptime at 98% and we have done almost 500 user jobs.

Probably revealing too much but here are our "JWNC approved" processes:

[cid:image005.png at 01DB167D.193701C0]

Cheers,
James
Dr. James Paul Grant
Research Engineer in Plasma Processing
Plasma Processing Group
james.grant at glasgow.ac.uk<mailto:james.grant at glasgow.ac.uk>
  [cid:image001.png at 01DB167C.91848AE0]
      www.JWNC.gla.ac.uk<http://www.jwnc.gla.ac.uk/>
[cid:image002.png at 01DB167C.91848AE0]  LinkedIn.com/company/JWNC<http://linkedin.com/company/JWNC>
[cid:image003.png at 01DB167C.91848AE0]  @UofG_JWNC<https://twitter.com/uofg_jwnc>
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Joseph Losby
Sent: 04 October 2024 03:00
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Small footprint PECVD for silicon nitride

Hi everyone,

We are looking for a smaller footprint PECVD tool strictly for the deposition of high quality SiN films.  Would you have any recommendations or other advice?  Some options are the Oxford PlasmaPro 80 and Trion Orion systems.

Cheers,
Joe



Joseph Losby, PhD

Manager, qLab Operations

joseph.losby at ucalgary.ca<mailto:joseph.losby at ucalgary.ca>



[cid:image004.jpg at 01DB167C.91848AE0]<https://io.ucalgary.ca/quantum-city>

Join us October 2-3, 2024 at the Telus Convention Centre<https://web-eur.cvent.com/event/57a389bc-f435-4ee8-86b5-0cc1c880b687/regProcessStep1> for qConnect 2024
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