[labnetwork] Small footprint ALD system for Al2O3

[Joseph Losby]

Hello,

Does anyone have a recommendation for a small footprint ALD system?  We are looking to deposit Al2O3 only.

Any thoughts on the Veeco Savannah<https://www.veeco.com/products/savannah-thermal-ald-for-rd/>?

Cheers,
Joe


Joseph Losby, PhD

Manager, qLab Operations

joseph.losby at ucalgary.ca


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