[labnetwork] Small footprint ALD system for Al2O3

[Mac Hathaway]

Hi Joe,

Mac here, at Harvard CNS.

We've been using two Savannahs for coming up on 17 years here. They are 
pretty robust and have served us well.

We also have an Arradiance Gemstar which we've also had for a number of 
years.

If I had to choose between them, I'd go with the Arradiance, but they 
are both pretty solid.


Mac


Mac Hathaway

Senior Process and Systems Engineer

Harvard Center for Nanoscale Systems

11 Oxford St.

Cambridge, MA02138

617-495-9012

On 9/5/2024 2:57 PM, Joseph Losby wrote:
> Hello,
>
> Does anyone have a recommendation for a small footprint ALD system?  
> We are looking to deposit Al2O3 only.
>
> Any thoughts on the Veeco Savannah 
> <https://urldefense.proofpoint.com/v2/url?u=https-3A__www.veeco.com_products_savannah-2Dthermal-2Dald-2Dfor-2Drd_&d=DwMFAw&c=WO-RGvefibhHBZq3fL85hQ&r=TEMLD8-VsxCGtcVzmvpT5GFNSczskEKHzW6aYlttmIY&m=ODSXhzqSu__Z1FHJg-7TQfKRqo9i0kcS2MgRPzn_eQVgDFmbsKFIXyaFbLJ6BYbr&s=3uO21TSwUeJjjrZLOq5YHs4pDHwCs614Va9VNHaMtRE&e=>? 
>
>
> Cheers,
> Joe
>
> *Joseph Losby, PhD*
>
> *Manager, qLab Operations*
>
> *joseph.losby at ucalgary.ca*
>
>
> <https://urldefense.proofpoint.com/v2/url?u=https-3A__io.ucalgary.ca_quantum-2Dcity&d=DwMFAw&c=WO-RGvefibhHBZq3fL85hQ&r=TEMLD8-VsxCGtcVzmvpT5GFNSczskEKHzW6aYlttmIY&m=ODSXhzqSu__Z1FHJg-7TQfKRqo9i0kcS2MgRPzn_eQVgDFmbsKFIXyaFbLJ6BYbr&s=cOQPxDtBMiTg5VpQsGKtbLGhlFAunY_obF5KjVOepR8&e=>
>
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