[labnetwork] Manufacturers of ALE systems

[Lino Eugene]

Hi,

I am looking at the manufacturers of atomic layer etchers and only found Oxford Instruments and Plasma-Therm so far. Are there other manufacturers?

For those who have an ALE system, I would like to get your feedback on the system performances and the support from the company if possible.

Best,

Lino Eugene, P.Eng., Ph.D.,
Micro/nanofabrication process engineer
Quantum-Nano Fabrication and Characterization Facility
Office of Research
QNC 1611
University of Waterloo
200 University Avenue West
Waterloo, ON, Canada
N2L 3G1

Ph: +1 519-888-4567 #37788
Cell: +1 226-929-1685
Websites:
https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/
https://fab.qnc.uwaterloo.ca/

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