[labnetwork] Mattson Aspen II Gas Distribution Head Inquiry

[Jacobs, Matthew - 0835 - MITLL]

Greetings, 

 

We are currently having uniformity issues with our Mattson Aspen II tool. We
have narrowed the issue down to the showerheads themselves but are
unfortunately coming up short regarding procurement. Does anyone have a
source for this part, or a spare(s)?

 

Mattson P/N  145-01000-00

 

 

Best,

Matt Jacobs 

MIT Lincoln Laboratory 

 

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