[labnetwork] Oxford Plasmalab System 100 Temperature controller

[Christophe Clément]

Hello all,
We need to replace both temperature controllers on our old Oxford Plasma Lab System 100 ICP-RIE. If anyone has already done this, could you please share the brand and part number?
Below is a picture of the original controllers. I was considering the Eurotherm EPC Series 3000 (3016) as a replacement, any other suggestion?
Thank you for your assistance.
Best regards, Chris


[cid:34941dc9-ad9f-405e-81cb-f71485aed920]


Christophe Clément

Professionnel de recherche

Laboratoire de microfabrication (LMF)

Groupe des Couches Minces (GCM) www.gcmlab.ca<http://www.gcmlab.ca/>

Ecole Polytechnique de Montréal www.polymtl.ca<http://www.polymtl.ca/>

Département de génie physique

* 2900 Boulevard Edouard Monpetit

Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4

* christophe.clement at polymtl.ca<mailto:christophe.clement at polymtl.ca>

* 514 340 4711 #2417

Fax : 514 340 5195
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