[labnetwork] Surplus equipment to be picked up ASAP

[Gohmyeong Bae]

Dear Labnetwork,

We had 3 equipment to go ASAP until this month.

Please let us know if you are interested in picking up these tools.

We can provide you less as possible even with free only in condition of picking up on-site.

Thank you.

Best,
Gohmyeong Bae.

STS Vision 320 Mark II RIE System

  *   Is the unit still installed, or deinstalled? - installed, but not operating.
  *   Is it missing any parts, or is it complete?- not missing, but PLC is broken down
  *   Does it have any faulty parts? - PLC/SW problem
  *   What is the vintage? - 2008
  *   What wafer size is it configured for? until 8inch (~250mm)
  *
What gasses/process was it running? CF4, CHF3, N2, O2, Ar,
  *   Does it have the PC? If so, what is the SW version? PC, I don't know. System is down when i was here.
  *   Does it have any accessories/pumps/chillers etc.? Vacuum pump, turbo pump, chillers

STS Vision 310 Mark II PECVD System


  *   Is the unit still installed, or deinstalled? - installed, but not operating.
  *   Is it missing any parts, or is it complete?- not missing, but PLC is broken down
  *   Does it have any faulty parts? - PLC/SW problem
  *   What is the vintage? - 2008
  *   What wafer size is it configured for? until 8inch (~250mm)
  *   What gasses/process was it running? SiH4/Ar2%, CH4, NH3, N2, O2, Ar, CF4, N2O
  *   Does it have the PC? If so, what is the SW version? PC, I don't know. System is down when i was here.
  *   Does it have any accessories/pumps/chillers etc.? Vacuum pump, turbo pump, no chillers

CHA SE-600 cryo system.



  *   Is the unit still installed, or deinstalled? - installed
  *   Is it missing any parts, or is it complete? - almost everything.
  *   Does it have any faulty parts? - power supply or filament unit
  *   What is the vintage? - 1980
  *   How many e-guns does it have? How many pockets does each gun have? Do they have power supplies? - 1 e-gun 4 pocket, power supply from temescal CV-8
  *   Wafer size? - 6inch
  *   Chamber diameter? - 19.5inch bell jar
  *   Is the fixturing lift-off or planetary? planetary
  *   What pumps style is it? Oil vacuum pump edward e9
  *   Controller type? Inficon IC6000
  *   What kind of ultra-high vacuum pump does this system have? Cryo pump



Gohmyeong Bae, M. S.
He/Him/His
Institute of Applied Life Science (IALS)
Cleanroom Facility Manager for Nano and Device Fabrication Cleanroom
Conte building B111, Marcus Hall 25
Amherst, MA 01003
413-472-1570
gohmyeongbae at umass.edu

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