[labnetwork] Leak checking chlorine etchers

[Dan P. Woodie]

Most Excellent Lab Network,

Some concerns have been recently raised about using our He leak checker on our chlorine etch systems, with the view that we could end up pulling residual chlorine into it and then eventually damaging the expensive test tool. Any advice from the collective wisdom on the risks of doing that and any mitigation strategies to suggest? One thought was to install some form of chlorine adsorber in the line, but that will impact the ability of the helium to reach the checker. Thanks.

Dan

Daniel Woodie
Director, Micro/Nano Fabrication Center, Princeton Materials Institute
Princeton University
155 Andlinger Center
86 Olden St
Princeton, NJ 08540

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