[labnetwork] Clamps on Plasma Therm's Takachi ICP-RIE system

[Dathathreya, Kavya]

Hello Everyone,

I wanted to check if any of you are having issue with breaking of ceramic clamp on Takachi ICP-RIE tool for high temperature etches?
Clamps on Takachi are breaking more often than other ICP-RIE (SLR 770) tool, 2 clamps in less than two months and tool is down for long periods as the lead time for this clamp is close to 3 months+.
We were told that the ceramic clamp for Takachi is thinner at the center compared to SLR 770. I am checking to see if any of you are experiencing the same issue and any measures you took to avoid this issue.
Additionally, I would like to know if you follow any particular order of steps when you run high temperature etches (180C)?

I appreciate your input.

Thanks,
Kavya Dathathreya
Research Associate
Nanotech West lab
The Ohio State University
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