[labnetwork] Clamps on Plasma Therm's Takachi ICP-RIE system

[Hosler, Richard S]

There are spring adjustments below the chamber area which may need to be adjusted. There is a double/jam nut acting as an end stop for the spring tension in the clamp. This worked its way off after a few years on mine and the tension went way up, breaking clamps.

Mine is a deposition tool, 170c Max. You might check the type of thermal fluid in your chiller as well, our original one was very borderline at 170 and switching to another one fixed the issue.

Rich

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Subject: [labnetwork] Clamps on Plasma Therm's Takachi ICP-RIE system

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Hello Everyone,

I wanted to check if any of you are having issue with breaking of ceramic clamp on Takachi ICP-RIE tool for high temperature etches?
Clamps on Takachi are breaking more often than other ICP-RIE (SLR 770) tool, 2 clamps in less than two months and tool is down for long periods as the lead time for this clamp is close to 3 months+.
We were told that the ceramic clamp for Takachi is thinner at the center compared to SLR 770. I am checking to see if any of you are experiencing the same issue and any measures you took to avoid this issue.
Additionally, I would like to know if you follow any particular order of steps when you run high temperature etches (180C)?

I appreciate your input.

Thanks,
Kavya Dathathreya
Research Associate
Nanotech West lab
The Ohio State University
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