[labnetwork] Glow around metals during ebeam evaporation

[Chris Cott]

Hi all,

We have been noticing an intermittent issue in two of our ebeam evaporators.

The symptoms are:
- A blue/green glow around the area the beam contacts the material
- Higher than usual power requirements to evaporate
- Partial deflection of the beam (e.g., a sweep pattern that is usually
contained within the crucible starts to contact the edges)

This happens only sometimes and only with certain materials, including Ag
and Cu.

Is anyone familiar with this and its cause? Is the glow plasma or
Bremsstrahlung from electrons being deflected? Can anyone point us in the
right direction towards a solution to the issue?

Thanks in advance!
Chris

-------------------------------------------------------------------------------------------
Chris Cott     *BAppSc, BSc, PhD.*

Process Engineer,

Melbourne Centre for Nanofabrication

151 Wellington Road, Clayton  3168

Victorian Node of the Australian National Fabrication Facility
Ph:  +61 (3) 9905 1562

W:   http://nanomelbourne.com

W:   http://www.anff.org.au <http://anff.org.au/>

E:    chris.cott at nanomelbourne.com
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20250415/655accd3/attachment.html>