[labnetwork] Glow around metals during ebeam evaporation

[Rob Belan]

Hi Chris,

What kind of crucible liner are you using for the metals?  It sounds like you are using an insulating crucible liner like Al2O3?  If so, you are not allowing the electrons to ground out.  This can then cause charging effects that you may be seeing.  Try switching to an electrically conductive crucible liner and this problem should go away for the metals.

Take care.

Rob


Rob Belan
Technical Director PVD Products
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Chris Cott
Sent: Tuesday, April 15, 2025 3:01 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Glow around metals during ebeam evaporation

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Hi all,

We have been noticing an intermittent issue in two of our ebeam evaporators.

The symptoms are:
- A blue/green glow around the area the beam contacts the material
- Higher than usual power requirements to evaporate
- Partial deflection of the beam (e.g., a sweep pattern that is usually contained within the crucible starts to contact the edges)

This happens only sometimes and only with certain materials, including Ag and Cu.

Is anyone familiar with this and its cause? Is the glow plasma or Bremsstrahlung from electrons being deflected? Can anyone point us in the right direction towards a solution to the issue?

Thanks in advance!
Chris

-------------------------------------------------------------------------------------------
Chris Cott     BAppSc, BSc, PhD.

Process Engineer,

Melbourne Centre for Nanofabrication

151 Wellington Road, Clayton  3168

Victorian Node of the Australian National Fabrication Facility
Ph:  +61 (3) 9905 1562

W:   http://nanomelbourne.com<http://nanomelbourne.com/>

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E:    chris.cott at nanomelbourne.com<mailto:chris.cott at nanomelbourne.com>

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