[labnetwork] H2 / NH3 Sputtering

[Ryan Rivers]

Hi Norman,

We have a custom system at the UC Berkeley Marvell NanoLab that we
developed in house. It can flow Ar, N2, O2, and H2. It's got very
aggressive pressure control as well as DC, RF, and HIPIMS sources. The
biggest challenge is usually navigating the sheer amount of materials
people want to deposit in it.

It's a *very* popular tool.

-Ryan

On Thu, Apr 17, 2025 at 5:30 AM Norman Gottron <ngottron at andrew.cmu.edu>
wrote:

> Hi All,
>
> I was wondering if anyone in the network has a system that is set up to
> sputter with a background of H2 or NH3.  We had a request for this process
> from a well-resourced company, but as of yet I haven't found anyone who
> could even have a conversation with them about it.  I'd be happy to put you
> directly in touch with them - I don't seek to be a middleman on this
> development project!
>
> Best,
> Norm Gottron
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