[labnetwork] Heidelberg uMLA direct write system

[Michelakis, Kostis]

Hi Justin,

Have a look at Durham Magneto Optics. I never had one of their tools but they have good reviews here in Labnetwork.

Kostis



Kostis Michelakis, PhD
DMF Lab Manager
kostis at slac.stanford.edu<mailto:kostis at slac.stanford.edu>
SLAC National Accelerator Laboratory
slac.stanford.edu<http://slac.stanford.edu>

On 4/17/2025 3:14 PM, Moreau, Justin L wrote:

Labnetwork Community,

We are looking at replacing our Heidelberg uP101 direct/mask write system.
We currently have a quote for a uMLA configured for 0.6um min feature, 150mm stage, optical focus and LED:365

Do you have a similar build? I welcome your feedback.
Do you know of any other direct write manufacturer whose quality and reliability are comparable to Heidelberg?


Thanks so much!





<https://www.linkedin.com/company/umass-lowell-core-research-facilities/>[University of Massachusetts Lowell]
Justin Moreau
Director, Nanofabrication Core
CORE RESEARCH FACILITIES
ETIC
E: Justin_Moreau at uml.edu<mailto:Justin_Moreau at uml.edu>
T: 978-934-3615   M: 978-337-8148

[cid:part2.LoVHsjSA.uLHVxVNA at slac.stanford.edu]<https://www.linkedin.com/company/umass-lowell-core-research-facilities/>




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