[labnetwork] Heidelberg uMLA direct write system

[Sun, Yong]

Hi Justin,

Raith has its own line of laser writer: https://raith.com/products/laser-lithography/

Though I have never worked with the tool, so cannot say anything about the performance or reliability of the Raith laser system.

Personally, I would choose the Heidelberg MLA150 maskless aligner if money is not an issue. The software interface of MLA150 is really user friendly.

Best,
Yong Sun
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Michelakis, Kostis <kostis at slac.stanford.edu>
Sent: Friday, April 18, 2025 11:34 AM
To: Moreau, Justin L <Justin_Moreau at uml.edu>; labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Heidelberg uMLA direct write system

Hi Justin,

Have a look at Durham Magneto Optics. I never had one of their tools but they have good reviews here in Labnetwork.

Kostis



Kostis Michelakis, PhD

DMF Lab Manager

kostis at slac.stanford.edu<mailto:kostis at slac.stanford.edu>

SLAC National Accelerator Laboratory

slac.stanford.edu<http://slac.stanford.edu/>



On 4/17/2025 3:14 PM, Moreau, Justin L wrote:



Labnetwork Community,



We are looking at replacing our Heidelberg uP101 direct/mask write system.

We currently have a quote for a uMLA configured for 0.6um min feature, 150mm stage, optical focus and LED:365



Do you have a similar build? I welcome your feedback.

Do you know of any other direct write manufacturer whose quality and reliability are comparable to Heidelberg?





Thanks so much!











<https://www.linkedin.com/company/umass-lowell-core-research-facilities/>[University of Massachusetts Lowell]

Justin Moreau

Director, Nanofabrication Core

CORE RESEARCH FACILITIES

ETIC

E: Justin_Moreau at uml.edu<mailto:Justin_Moreau at uml.edu>

T: 978-934-3615   M: 978-337-8148



[cid:part2.LoVHsjSA.uLHVxVNA at slac.stanford.edu]<https://www.linkedin.com/company/umass-lowell-core-research-facilities/>





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