[labnetwork] Heidelberg uMLA direct write system

[Russ Renzas]

We have uMLA as our first mask aligner here in Reno. Very happy so far, though we’ve really only been using it a few weeks thus far.

Russ Renzas
University of Nevada, Reno
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Deng, Jiangdong <jdeng at cns.fas.harvard.edu>
Sent: Friday, April 18, 2025 2:11:58 PM
To: Moreau, Justin L <Justin_Moreau at uml.edu>; labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Heidelberg uMLA direct write system


[EXTERNAL EMAIL]


Hi, Justin,

You may know that we in CNS have a MLA150-1um, a MLA150-0.6um, and a uMLA-1um. They are all good. Please feel free to call me or stop by for more details.

Best!

-JD





From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Moreau, Justin L <Justin_Moreau at uml.edu>
Date: Friday, April 18, 2025 at 7:42 AM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Heidelberg uMLA direct write system



Labnetwork Community,



We are looking at replacing our Heidelberg uP101 direct/mask write system.

We currently have a quote for a uMLA configured for 0.6um min feature, 150mm stage, optical focus and LED:365



Do you have a similar build? I welcome your feedback.

Do you know of any other direct write manufacturer whose quality and reliability are comparable to Heidelberg?





Thanks so much!











[University of Massachusetts Lowell]

Justin Moreau

Director, Nanofabrication Core

CORE RESEARCH FACILITIES

ETIC

E: Justin_Moreau at uml.edu<mailto:Justin_Moreau at uml.edu>

T: 978-934-3615   M: 978-337-8148



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