[labnetwork] Heidelberg uMLA direct write system

[Deng, Jiangdong]

Hi, Justin,
You may know that we in CNS have a MLA150-1um, a MLA150-0.6um, and a uMLA-1um. They are all good. Please feel free to call me or stop by for more details.
Best!
-JD


From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Moreau, Justin L <Justin_Moreau at uml.edu>
Date: Friday, April 18, 2025 at 7:42 AM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Heidelberg uMLA direct write system

Labnetwork Community,

We are looking at replacing our Heidelberg uP101 direct/mask write system.
We currently have a quote for a uMLA configured for 0.6um min feature, 150mm stage, optical focus and LED:365

Do you have a similar build? I welcome your feedback.
Do you know of any other direct write manufacturer whose quality and reliability are comparable to Heidelberg?


Thanks so much!





[University of Massachusetts Lowell]
Justin Moreau
Director, Nanofabrication Core
CORE RESEARCH FACILITIES
ETIC
E: Justin_Moreau at uml.edu<mailto:Justin_Moreau at uml.edu>
T: 978-934-3615   M: 978-337-8148

[cid:image002.jpg at 01DBAFC2.BB421CF0]<https://urldefense.proofpoint.com/v2/url?u=https-3A__www.linkedin.com_company_umass-2Dlowell-2Dcore-2Dresearch-2Dfacilities_&d=DwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=xyAjVPR-2dDowrLX0t_yU46ZECNmXwhK82bRlJRQKq4&m=K4xvp9xsf4FSJ4C0cEtZ1fascwRCz6HgIlpaLXB8G-inGhwBsUkZ39Hh-i0XyuKk&s=32tN_eMuv9gQMSAAyIGZ-f14Ljrw2jRkOfXL2dSVy3k&e=>

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