[labnetwork] Looking for a particular RF generator

Martin, Michael michael.martin at louisville.edu
Tue Aug 5 12:52:00 EDT 2025


Hey Steve,
    We have an older STS in mothballs.  Will have a look at it this afternoon.

-Michael
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Paolini, Steven <spaolini at cns.fas.harvard.edu>
Sent: Friday, August 1, 2025 2:41 PM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Looking for a particular RF generator


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Dear fellow fabbers,

  I am looking for an RF generator for an older STS ICP.

The generator as an MKS/ENI Spectrum model B1513. The specs are: 13.56 MHZ, 1500W, liquid cooled and is sized for a half rack mount. The part# is: S-04-049A.

We are willing to pay good money if anyone has one that they can spare.

Thanks in advance!



Equipment Dood.



Steve Paolini

Principal Equipment Engineer

Harvard University Center for Nanoscale Systems

11 Oxford St.

Cambridge, MA 02138

617- 496- 9816

spaolini at cns.fas.harvard.edu

www.cns.fas.harvard.edu


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