[labnetwork] Looking for a particular RF generator

[Khanna, Rohit]

HI Steve,
                  Hope you are doing well. Did you consider buying the MKS/ENI 3KW 13.56 MHz Rf generator? We had issue with our 1500W RF generator and we did approach MKS for repairs, initially they did accept the unit for repair however they returned the unit back stating they don't service them as parts for the units are no longer available. If I may ask what went wrong with your existing generator?
Did you consider the following unit? Its a 3KW unit with very similar characteristics.....in fact it might be possible to suppliment 1500W unit with 3KW unit if the machine interface is modified slightly.
https://www.ebay.co.uk/itm/306087290890

Warm Regards
Rohit Khanna
Electronic Test & Measurement Engineer
London Centre for NANO Technology, UCL
Ph:+44-020-76799984
Lab: +44 20 3108 1516
Int Ext: 39984

________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Paolini, Steven <spaolini at cns.fas.harvard.edu>
Sent: 01 August 2025 19:41
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Looking for a particular RF generator


⚠ Caution: External sender


Dear fellow fabbers,

  I am looking for an RF generator for an older STS ICP.

The generator as an MKS/ENI Spectrum model B1513. The specs are: 13.56 MHZ, 1500W, liquid cooled and is sized for a half rack mount. The part# is: S-04-049A.

We are willing to pay good money if anyone has one that they can spare.

Thanks in advance!



Equipment Dood.



Steve Paolini

Principal Equipment Engineer

Harvard University Center for Nanoscale Systems

11 Oxford St.

Cambridge, MA 02138

617- 496- 9816

spaolini at cns.fas.harvard.edu

www.cns.fas.harvard.edu


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