[labnetwork] Servicing Suss MABA-6 mask aligner?

[Garry J. Bordonaro]

Jeff,

 

We have used Kyle Willis several times with good experiences.

 

Kyle Willis, President
Willis Equipment
408.966.6800
http://wecpro.com/

 

Kyle Willis Kyle at wecpro.com <mailto:Kyle at wecpro.com> 

 

 

Garry J. Bordonaro

Microlithographic Engineer

Cornell NanoScale Facility

250 Duffield Hall

343 Campus Road

Ithaca NY 14853-2700

(607) 254-4936

 <mailto:bordonaro at cnf.cornell.edu> bordonaro at cnf.cornell.edu

 <http://www.cnf.cornell.edu/> http://www.cnf.cornell.edu/

 

Please acknowledge CNF in your publications:

"This work was performed in part at the Cornell NanoScale Science &
Technology Facility (CNF), a member of the National Nanotechnology
Coordinated Infrastructure (NNCI), which is supported by the National
Science Foundation (Grant NNCI-2025233)."

 

 

 

 

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Jeff Salzmann
Sent: Wednesday, December 17, 2025 9:34 AM
To: Network Fab <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Servicing Suss MABA-6 mask aligner?

 

Hello!

 

Anyone have any experience/recommendations for servicing a Suss MABA-6 mask
aligner? Thank you in advance!!!

 

Regards,

Jeff

 

 

Jeff Salzmann

Research Assistant Professor of Electrical Engineering

Cleanroom Manager, Shared Instrumentation Laboratories

School of Engineering and Applied Sciences

University at Buffalo

114A Davis Hall

Buffalo, NY 14260

Tel: 716.645.2584

 

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