[labnetwork] Servicing Suss MABA-6 mask aligner?

[Greg Allion]

I've worked with both Mark Anderson at AlignTech  and Jude Bartlebaugh.
Jude's an ex Sus guy as well.  Jude.Bart at einmas.com (919)270-0000
Both are great.  Mark has a better parts inventory, Jude can completely
tear down, calibrate, full PM in less than a day.
Classone equipment recently acquired a huge amount of Suss parts from the
Suss reman department, if you know what part you need.  Vanessa and Jehan
are both very responsive there.
Good luck,
Greg

On Wed, Dec 17, 2025 at 8:05 PM Garry J. Bordonaro <
bordonaro at cnf.cornell.edu> wrote:

> Jeff,
>
>
>
> We have used Kyle Willis several times with good experiences.
>
>
>
> Kyle Willis, President
> Willis Equipment
> 408.966.6800
> http://wecpro.com/
>
>
>
> Kyle Willis Kyle at wecpro.com
>
>
>
>
>
> Garry J. Bordonaro
>
> Microlithographic Engineer
>
> Cornell NanoScale Facility
>
> 250 Duffield Hall
>
> 343 Campus Road
>
> Ithaca NY 14853-2700
>
> (607) 254-4936
>
> bordonaro at cnf.cornell.edu
>
> http://www.cnf.cornell.edu/
>
>
>
> Please acknowledge CNF in your publications:
>
> "This work was performed in part at the Cornell NanoScale Science &
> Technology Facility (CNF), a member of the National Nanotechnology
> Coordinated Infrastructure (NNCI), which is supported by the National
> Science Foundation (Grant NNCI-2025233)."
>
>
>
>
>
>
>
>
>
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of *Jeff
> Salzmann
> *Sent:* Wednesday, December 17, 2025 9:34 AM
> *To:* Network Fab <labnetwork at mtl.mit.edu>
> *Subject:* [labnetwork] Servicing Suss MABA-6 mask aligner?
>
>
>
> Hello!
>
>
>
> Anyone have any experience/recommendations for servicing a Suss MABA-6
> mask aligner? Thank you in advance!!!
>
>
>
> Regards,
>
> Jeff
>
>
>
>
>
> Jeff Salzmann
>
> Research Assistant Professor of Electrical Engineering
>
> Cleanroom Manager, Shared Instrumentation Laboratories
>
> School of Engineering and Applied Sciences
>
> University at Buffalo
>
> 114A Davis Hall
>
> Buffalo, NY 14260
>
> Tel: 716.645.2584
>
>
> _______________________________________________
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> labnetwork at mtl.mit.edu
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>


-- 
Greg Allion
NC State University Nanofabrication Facility (NNF)
Process Integration Engineering Manager

Monteith Research Center
2410 Campus Shore Drive rm.243F
Raleigh, NC 27606
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