[labnetwork] Cleanroom humidity

[Michael Helmbrecht]

We are also in the 40-60% range most of the time.

High humidity clouds our BARC when we spin it. Once spun and baked, it
appears to be fine. It appears to be the most sensitive of our resists.

- Michael


On Wed, Dec 17, 2025 at 3:46 PM Peder Lenvik <plenvik at ucsb.edu> wrote:

> 40 to 60
> Or 50 +/- 10
>
> Peder Lenvik
>
> Sr. Facilities Lead
>
> Electrical and Computer Engineering
> E.S.B. Bldg. #225, Room 1109F
> University California Santa Barbara, Santa Barbara, Ca. 93106
>
>
> On Wed, Dec 17, 2025 at 14:03 Alex Dixon <agdixon at mines.edu> wrote:
>
>> For those of you with climate controls in your cleanrooms, what relative
>> humidity do your keep your cleanroom at, and how tightly do you control the
>> fluccuations?  How significant an effect have you seen on device
>> performance?
>>
>> Our campus facilities is doing a climate control audit and asking any lab
>> with special requirements to justify them. Any info you could share would
>> be appreceated.
>>
>> Thanks!
>> -Alex
>>
>> __________________________________________________________
>>
>>
>> Alex Dixon, Ph.D. (He/Him)
>> Lab Manager
>> Nanofabrication and Thin Film Deposition
>> Shared Instrument Facility
>> Colorado School of Mines
>>
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