[labnetwork] Cleanroom humidity

[Garry J. Bordonaro]

Alex,

 

In our building we maintain 21C ( I believe) and 42% RH.  Temp is +/-1C, RH
+/-2%.  Different processes are affected in different ways by these, so
control is the only way to ensure consistent results.  For example,
photolith is very sensitive to RH, wet chemistry to temp.

 

We also move ~60000 cfm through the HEPAs.

 

 

Regards,

Garry J. Bordonaro

Microlithographic Engineer

Cornell NanoScale Facility

250 Duffield Hall

343 Campus Road

Ithaca NY 14853-2700

(607) 254-4936

 <mailto:bordonaro at cnf.cornell.edu> bordonaro at cnf.cornell.edu

 <http://www.cnf.cornell.edu/> http://www.cnf.cornell.edu/

 

Please acknowledge CNF in your publications:

"This work was performed in part at the Cornell NanoScale Science &
Technology Facility (CNF), a member of the National Nanotechnology
Coordinated Infrastructure (NNCI), which is supported by the National
Science Foundation (Grant NNCI-2025233)."

 

 

 

 

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Alex Dixon
Sent: Wednesday, December 17, 2025 12:12 PM
To: Lab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Cleanroom humidity

 

For those of you with climate controls in your cleanrooms, what relative
humidity do your keep your cleanroom at, and how tightly do you control the
fluccuations?  How significant an effect have you seen on device
performance? 

 

Our campus facilities is doing a climate control audit and asking any lab
with special requirements to justify them. Any info you could share would be
appreceated.

 

Thanks!

-Alex

 

__________________________________________________________

 

 

Alex Dixon, Ph.D. (He/Him)

Lab Manager

Nanofabrication and Thin Film Deposition

Shared Instrument Facility 

Colorado School of Mines

 

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