[labnetwork] Cleanroom humidity

[Dennis Schweiger]

Alex,

Here at the UofMichigan, we're looking for 43.5% +/- 1% in all of the
"general" cleanroom spaces with a temperature of 68F, and in our submicron
(ISO4/Class 10) we shoot for 43.5% +/- 0.5% and 68F.  Other than a couple
of days in the spring, and fall, we can usually hit that target.

Dennis Schweiger
University of Michigan/LNF
Facilities

734.647.2055 Ofc

On Wed, Dec 17, 2025 at 5:03 PM Alex Dixon <agdixon at mines.edu> wrote:

> For those of you with climate controls in your cleanrooms, what relative
> humidity do your keep your cleanroom at, and how tightly do you control the
> fluccuations?  How significant an effect have you seen on device
> performance?
>
> Our campus facilities is doing a climate control audit and asking any lab
> with special requirements to justify them. Any info you could share would
> be appreceated.
>
> Thanks!
> -Alex
>
> __________________________________________________________
>
>
> Alex Dixon, Ph.D. (He/Him)
> Lab Manager
> Nanofabrication and Thin Film Deposition
> Shared Instrument Facility
> Colorado School of Mines
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20251218/1945d3c1/attachment.html>