[labnetwork] Suss MJB4 mask aligner light source

[Massey, Travis]

We bought our MA6 second-hand with an LED light source a few years ago.  Love it.  Highly recommend.  You can modulate the intensity of (or disable) the different wavelengths, meaning you can set it to pure i-line or pure g-line to match the curves in the resist manufacturers' datasheets.

Travis Massey
massey21 at llnl.gov
Lawrence Livermore National Laboratory

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Nathan Aultman
Sent: Monday, February 10, 2025 1:21 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Suss MJB4 mask aligner light source

Hello Labnetwork,

We have a Suss Microtec MJB4 contact mask aligner at one of our labs.  We have been told that there is a Suss LED upgrade available.  Have any of your labs purchased such an upgrade either from Suss or from a second source supplier to replace your mercury arc lamps?

Greatly appreciate any thoughts or suggestions...

Nathan C. Aultman
University of Central Florida
407-823-6852
naultman at creol.ucf.edu<mailto:naultman at creol.ucf.edu>

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