[labnetwork] Suss MJB4 mask aligner light source

[Roman Akhmechet]

We replaced mercury lamps in our three MJB4s with Idonus UV-LED with 365 and 405 diodes.

Roman

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Nathan Aultman
Sent: Monday, February 10, 2025 4:21 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Suss MJB4 mask aligner light source

Hello Labnetwork,

We have a Suss Microtec MJB4 contact mask aligner at one of our labs.  We have been told that there is a Suss LED upgrade available.  Have any of your labs purchased such an upgrade either from Suss or from a second source supplier to replace your mercury arc lamps?

Greatly appreciate any thoughts or suggestions...

Nathan C. Aultman
University of Central Florida
407-823-6852
naultman at creol.ucf.edu<mailto:naultman at creol.ucf.edu>

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