[labnetwork] Vendors for AZ 5214IR resist?

[Garry J. Bordonaro]

I should also mention that the IR capabilities of 5214 are marginal and
deteriorate with time.  We use AZ nLOF2020 for IR applications, or a NH3
process.

 

 

Garry J. Bordonaro

Microlithographic Engineer

Cornell NanoScale Facility

250 Duffield Hall

343 Campus Road

Ithaca NY 14853-2700

(607) 254-4936

 <mailto:bordonaro at cnf.cornell.edu> bordonaro at cnf.cornell.edu

 <http://www.cnf.cornell.edu/> http://www.cnf.cornell.edu/

 

Please acknowledge CNF in your publications:

"This work was performed in part at the Cornell NanoScale Science &
Technology Facility (CNF), a member of the National Nanotechnology
Coordinated Infrastructure (NNCI), which is supported by the National
Science Foundation (Grant NNCI-2025233)."

 

 

 

 

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Jeff Salzmann
Sent: Tuesday, January 7, 2025 10:34 AM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Vendors for AZ 5214IR resist?

 

Hope you can save me some frustrations here- I'm looking to source a vendor
that sells AZ 5214IR resist. Any recommendations?

 

Thanks!!!

Jeff

 

Jeff Salzmann

Assistant Professor of Research

Cleanroom Manager, Shared Instrumentation Laboratories

School of Engineering and Applied Sciences

University at Buffalo

114A Davis Hall

Buffalo, NY 14260

Tel: 716.645.2584

 

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